Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack

• Main Authors: Gao, F., Lee, S.J., Li, R., Balakumar, S., Tung, C.-H., Chi, D.-Z., Kwong, D.-L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84160
• Institution: National University of Singapore

Materials Research Society Symposium Proceedings