Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack

Materials Research Society Symposium Proceedings

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Bibliographic Details
Main Authors:	Gao, F., Lee, S.J., Li, R., Balakumar, S., Tung, C.-H., Chi, D.-Z., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84160
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84160
record_format	dspace
spelling	sg-nus-scholar.10635-841602015-01-11T20:24:07Z Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack Gao, F. Lee, S.J. Li, R. Balakumar, S. Tung, C.-H. Chi, D.-Z. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium Proceedings 913 19-25 MRSPD 2014-10-07T04:49:29Z 2014-10-07T04:49:29Z 2006 Conference Paper Gao, F.,Lee, S.J.,Li, R.,Balakumar, S.,Tung, C.-H.,Chi, D.-Z.,Kwong, D.-L. (2006). Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack. Materials Research Society Symposium Proceedings 913 : 19-25. ScholarBank@NUS Repository. 1558998691 02729172 http://scholarbank.nus.edu.sg/handle/10635/84160 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Gao, F. Lee, S.J. Li, R. Balakumar, S. Tung, C.-H. Chi, D.-Z. Kwong, D.-L.
format	Conference or Workshop Item
author	Gao, F. Lee, S.J. Li, R. Balakumar, S. Tung, C.-H. Chi, D.-Z. Kwong, D.-L.
spellingShingle	Gao, F. Lee, S.J. Li, R. Balakumar, S. Tung, C.-H. Chi, D.-Z. Kwong, D.-L. Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack
author_sort	Gao, F.
title	Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack
title_short	Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack
title_full	Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack
title_fullStr	Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack
title_full_unstemmed	Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack
title_sort	schottky source/drain transistor on thin sige on insulator integrated with hfo2/tan gate stack
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84160
_version_	1681089567751405568

Schottky source/drain transistor on thin SiGe on insulator integrated with HfO2/TaN gate stack

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