Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures
10.1016/j.sna.2006.09.006
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Main Authors: | Pandey, A.K., Pratap, R., Chau, F.S. |
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其他作者: | MECHANICAL ENGINEERING |
格式: | Article |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/59536 |
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機構: | National University of Singapore |
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