Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies

Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies

10.1016/j.actamat.2007.10.051

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Bibliographic Details
Main Authors: Yeap, K.B., Zeng, K., Chi, D.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Dielectrics
Interfaces
Nanoindentation
Thin films
Toughness
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59890
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Institution: National University of Singapore
id sg-nus-scholar.10635-59890
record_format dspace
spelling sg-nus-scholar.10635-598902023-10-26T20:48:17Z Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies Yeap, K.B. Zeng, K. Chi, D. MECHANICAL ENGINEERING Dielectrics Interfaces Nanoindentation Thin films Toughness 10.1016/j.actamat.2007.10.051 Acta Materialia 56 5 977-984 2014-06-17T06:16:46Z 2014-06-17T06:16:46Z 2008-03 Article Yeap, K.B., Zeng, K., Chi, D. (2008-03). Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies. Acta Materialia 56 (5) : 977-984. ScholarBank@NUS Repository. https://doi.org/10.1016/j.actamat.2007.10.051 13596454 http://scholarbank.nus.edu.sg/handle/10635/59890 000254183000007 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Dielectrics
Interfaces
Nanoindentation
Thin films
Toughness
spellingShingle Dielectrics
Interfaces
Nanoindentation
Thin films
Toughness
Yeap, K.B.
Zeng, K.
Chi, D.
Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies
description 10.1016/j.actamat.2007.10.051
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Yeap, K.B.
Zeng, K.
Chi, D.
format Article
author Yeap, K.B.
Zeng, K.
Chi, D.
author_sort Yeap, K.B.
title Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies
title_short Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies
title_full Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies
title_fullStr Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies
title_full_unstemmed Determining the interfacial toughness of low-k films on Si substrate by wedge indentation: Further studies
title_sort determining the interfacial toughness of low-k films on si substrate by wedge indentation: further studies
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/59890
_version_ 1781781723263008768

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