Strategies in deep wet etching of Pyrex glass

10.1016/j.sna.2006.06.044

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Bibliographic Details
Main Authors:	Iliescu, C., Tay, F.E.H., Miao, J.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Masking layer Residual stress Wet etching of glass
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61378
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61378
record_format	dspace
spelling	sg-nus-scholar.10635-613782024-11-12T19:00:30Z Strategies in deep wet etching of Pyrex glass Iliescu, C. Tay, F.E.H. Miao, J. MECHANICAL ENGINEERING Masking layer Residual stress Wet etching of glass 10.1016/j.sna.2006.06.044 Sensors and Actuators, A: Physical 133 2 SPEC. ISS. 395-400 SAAPE 2014-06-17T06:34:24Z 2014-06-17T06:34:24Z 2007-02-12 Article Iliescu, C., Tay, F.E.H., Miao, J. (2007-02-12). Strategies in deep wet etching of Pyrex glass. Sensors and Actuators, A: Physical 133 (2 SPEC. ISS.) : 395-400. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2006.06.044 09244247 http://scholarbank.nus.edu.sg/handle/10635/61378 000244515800021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Masking layer Residual stress Wet etching of glass
spellingShingle	Masking layer Residual stress Wet etching of glass Iliescu, C. Tay, F.E.H. Miao, J. Strategies in deep wet etching of Pyrex glass
description	10.1016/j.sna.2006.06.044
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Iliescu, C. Tay, F.E.H. Miao, J.
format	Article
author	Iliescu, C. Tay, F.E.H. Miao, J.
author_sort	Iliescu, C.
title	Strategies in deep wet etching of Pyrex glass
title_short	Strategies in deep wet etching of Pyrex glass
title_full	Strategies in deep wet etching of Pyrex glass
title_fullStr	Strategies in deep wet etching of Pyrex glass
title_full_unstemmed	Strategies in deep wet etching of Pyrex glass
title_sort	strategies in deep wet etching of pyrex glass
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61378
_version_	1821209278075109376

Strategies in deep wet etching of Pyrex glass

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