Strategies in deep wet etching of Pyrex glass

Strategies in deep wet etching of Pyrex glass

10.1016/j.sna.2006.06.044

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Bibliographic Details
Main Authors: Iliescu, C., Tay, F.E.H., Miao, J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Masking layer
Residual stress
Wet etching of glass
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61378
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/61378

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