Strategies in deep wet etching of Pyrex glass

• Main Authors: Iliescu, C., Tay, F.E.H., Miao, J.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Masking layer; Residual stress; Wet etching of glass
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/61378
• Institution: National University of Singapore

10.1016/j.sna.2006.06.044