Application of molecular dynamics for low-energy ion implantation in crystalline silicon

• Main Authors: Chan, H.Y., Srinivasan, M.P., Montgomery, N.J., Mulcahy, C.P.A., Biswas, S., Gossmann, H.-J.L., Harris, M., Nordlund, K., Benistant, F., Ng, C.M., Gui, D., Chan, L.
• Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/63500
• Institution: National University of Singapore

10.1116/1.2137333