Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge

Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge

10.1557/jmr.2011.48

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Bibliographic Details
Main Authors: Tsai, J.T.H., Lin, T.-Y., Chua, D.H.C.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Subjects:
Crystalline
Si
Thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/64934
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Institution: National University of Singapore
Description
Summary:10.1557/jmr.2011.48

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