Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
10.1557/jmr.2011.48
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Main Authors: | Tsai, J.T.H., Lin, T.-Y., Chua, D.H.C. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/64934 |
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Institution: | National University of Singapore |
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