Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge

10.1557/jmr.2011.48

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Bibliographic Details
Main Authors:	Tsai, J.T.H., Lin, T.-Y., Chua, D.H.C.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Subjects:	Crystalline Si Thin film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/64934
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-64934
record_format	dspace
spelling	sg-nus-scholar.10635-649342023-10-29T23:01:22Z Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge Tsai, J.T.H. Lin, T.-Y. Chua, D.H.C. MATERIALS SCIENCE AND ENGINEERING Crystalline Si Thin film 10.1557/jmr.2011.48 Journal of Materials Research 26 9 1076-1080 JMREE 2014-06-17T07:59:11Z 2014-06-17T07:59:11Z 2011-05-14 Article Tsai, J.T.H., Lin, T.-Y., Chua, D.H.C. (2011-05-14). Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge. Journal of Materials Research 26 (9) : 1076-1080. ScholarBank@NUS Repository. https://doi.org/10.1557/jmr.2011.48 08842914 http://scholarbank.nus.edu.sg/handle/10635/64934 000292830700003 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Crystalline Si Thin film
spellingShingle	Crystalline Si Thin film Tsai, J.T.H. Lin, T.-Y. Chua, D.H.C. Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
description	10.1557/jmr.2011.48
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Tsai, J.T.H. Lin, T.-Y. Chua, D.H.C.
format	Article
author	Tsai, J.T.H. Lin, T.-Y. Chua, D.H.C.
author_sort	Tsai, J.T.H.
title	Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
title_short	Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
title_full	Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
title_fullStr	Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
title_full_unstemmed	Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
title_sort	low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/64934
_version_	1781782529370488832

Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge

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