3-D MEMS VOA using electromagnetic and electrothermal actuations

10.1109/OECC.2012.6276467

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Bibliographic Details
Main Authors: Koh, K.H., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68680
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Institution: National University of Singapore

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