Backside reflectance modulation of microscale metal interconnects

Backside reflectance modulation of microscale metal interconnects

10.1109/IRPS.2011.5784577

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Bibliographic Details
Main Authors: Teo, J.K.J., Chua, C.M., Koh, L.S., Phang, J.C.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
laser reflectance
metal interconnect
substrate thickness
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69489
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Institution: National University of Singapore
Description
Summary:10.1109/IRPS.2011.5784577

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