Backside reflectance modulation of microscale metal interconnects

10.1109/IRPS.2011.5784577

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Bibliographic Details
Main Authors:	Teo, J.K.J., Chua, C.M., Koh, L.S., Phang, J.C.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	laser reflectance metal interconnect substrate thickness
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69489
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69489
record_format	dspace
spelling	sg-nus-scholar.10635-694892015-01-16T23:20:19Z Backside reflectance modulation of microscale metal interconnects Teo, J.K.J. Chua, C.M. Koh, L.S. Phang, J.C.H. ELECTRICAL & COMPUTER ENGINEERING laser reflectance metal interconnect substrate thickness 10.1109/IRPS.2011.5784577 IEEE International Reliability Physics Symposium Proceedings FA.4.1-FA.4.6 2014-06-19T03:01:18Z 2014-06-19T03:01:18Z 2011 Conference Paper Teo, J.K.J.,Chua, C.M.,Koh, L.S.,Phang, J.C.H. (2011). Backside reflectance modulation of microscale metal interconnects. IEEE International Reliability Physics Symposium Proceedings : FA.4.1-FA.4.6. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IRPS.2011.5784577" target="_blank">https://doi.org/10.1109/IRPS.2011.5784577</a> 9781424491117 15417026 http://scholarbank.nus.edu.sg/handle/10635/69489 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	laser reflectance metal interconnect substrate thickness
spellingShingle	laser reflectance metal interconnect substrate thickness Teo, J.K.J. Chua, C.M. Koh, L.S. Phang, J.C.H. Backside reflectance modulation of microscale metal interconnects
description	10.1109/IRPS.2011.5784577
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Teo, J.K.J. Chua, C.M. Koh, L.S. Phang, J.C.H.
format	Conference or Workshop Item
author	Teo, J.K.J. Chua, C.M. Koh, L.S. Phang, J.C.H.
author_sort	Teo, J.K.J.
title	Backside reflectance modulation of microscale metal interconnects
title_short	Backside reflectance modulation of microscale metal interconnects
title_full	Backside reflectance modulation of microscale metal interconnects
title_fullStr	Backside reflectance modulation of microscale metal interconnects
title_full_unstemmed	Backside reflectance modulation of microscale metal interconnects
title_sort	backside reflectance modulation of microscale metal interconnects
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69489
_version_	1681087023079751680

Backside reflectance modulation of microscale metal interconnects

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