Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
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| المؤلفون الرئيسيون: | , , , , |
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| مؤلفون آخرون: | |
| التنسيق: | Conference or Workshop Item |
| منشور في: |
2014
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| الوصول للمادة أونلاين: | http://scholarbank.nus.edu.sg/handle/10635/70006 |
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| المؤسسة: | National University of Singapore |
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sg-nus-scholar.10635-70006 |
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sg-nus-scholar.10635-700062024-11-15T04:23:02Z Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV Hong, Y.D. Yan, J. Wong, K.M. Yeow, Y.T. Chim, W.K. ELECTRICAL & COMPUTER ENGINEERING International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 2 954-957 2014-06-19T03:07:08Z 2014-06-19T03:07:08Z 2004 Conference Paper Hong, Y.D.,Yan, J.,Wong, K.M.,Yeow, Y.T.,Chim, W.K. (2004). Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV. International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 2 : 954-957. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/70006 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Hong, Y.D. Yan, J. Wong, K.M. Yeow, Y.T. Chim, W.K. |
| format |
Conference or Workshop Item |
| author |
Hong, Y.D. Yan, J. Wong, K.M. Yeow, Y.T. Chim, W.K. |
| spellingShingle |
Hong, Y.D. Yan, J. Wong, K.M. Yeow, Y.T. Chim, W.K. Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV |
| author_sort |
Hong, Y.D. |
| title |
Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV |
| title_short |
Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV |
| title_full |
Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV |
| title_fullStr |
Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV |
| title_full_unstemmed |
Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV |
| title_sort |
dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dc/dv |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70006 |
| _version_ |
1821219086249492480 |