Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV

Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

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Main Authors: Hong, Y.D., Yan, J., Wong, K.M., Yeow, Y.T., Chim, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70006
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-700062015-02-03T17:37:42Z Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV Hong, Y.D. Yan, J. Wong, K.M. Yeow, Y.T. Chim, W.K. ELECTRICAL & COMPUTER ENGINEERING International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 2 954-957 2014-06-19T03:07:08Z 2014-06-19T03:07:08Z 2004 Conference Paper Hong, Y.D.,Yan, J.,Wong, K.M.,Yeow, Y.T.,Chim, W.K. (2004). Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV. International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 2 : 954-957. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/70006 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Hong, Y.D.
Yan, J.
Wong, K.M.
Yeow, Y.T.
Chim, W.K.
format Conference or Workshop Item
author Hong, Y.D.
Yan, J.
Wong, K.M.
Yeow, Y.T.
Chim, W.K.
spellingShingle Hong, Y.D.
Yan, J.
Wong, K.M.
Yeow, Y.T.
Chim, W.K.
Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
author_sort Hong, Y.D.
title Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
title_short Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
title_full Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
title_fullStr Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
title_full_unstemmed Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV
title_sort dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dc/dv
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70006
_version_ 1681087119008727040

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