Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process

Materials Research Society Symposium - Proceedings

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Main Authors:	Chong, D., Yoo, W.J., Chan, L., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70098
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70098
record_format	dspace
spelling	sg-nus-scholar.10635-700982015-02-03T17:59:45Z Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process Chong, D. Yoo, W.J. Chan, L. See, A. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 716 197-202 MRSPD 2014-06-19T03:08:15Z 2014-06-19T03:08:15Z 2002 Conference Paper Chong, D.,Yoo, W.J.,Chan, L.,See, A. (2002). Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process. Materials Research Society Symposium - Proceedings 716 : 197-202. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/70098 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chong, D. Yoo, W.J. Chan, L. See, A.
format	Conference or Workshop Item
author	Chong, D. Yoo, W.J. Chan, L. See, A.
spellingShingle	Chong, D. Yoo, W.J. Chan, L. See, A. Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process
author_sort	Chong, D.
title	Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process
title_short	Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process
title_full	Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process
title_fullStr	Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process
title_full_unstemmed	Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process
title_sort	effects of poly-si annealing on gate oxide charging damage in poly-si gate etching process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70098
_version_	1681087136386777088

Effects of poly-Si annealing on gate oxide charging damage in Poly-Si gate etching process

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