Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography

Proceedings of the 12th IASTED International Conference on Control and Applications, CA 2010

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Bibliographic Details
Main Authors:	Qu, Y., Tay, A., Lee, T.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Circuit performance Optical proximity correction PI controller
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70326
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70326
record_format	dspace
spelling	sg-nus-scholar.10635-703262015-04-18T08:07:31Z Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography Qu, Y. Tay, A. Lee, T.H. ELECTRICAL & COMPUTER ENGINEERING Circuit performance Optical proximity correction PI controller Proceedings of the 12th IASTED International Conference on Control and Applications, CA 2010 593-599 2014-06-19T03:10:52Z 2014-06-19T03:10:52Z 2010 Conference Paper Qu, Y.,Tay, A.,Lee, T.H. (2010). Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography. Proceedings of the 12th IASTED International Conference on Control and Applications, CA 2010 : 593-599. ScholarBank@NUS Repository. 9780889868526 http://scholarbank.nus.edu.sg/handle/10635/70326 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Circuit performance Optical proximity correction PI controller
spellingShingle	Circuit performance Optical proximity correction PI controller Qu, Y. Tay, A. Lee, T.H. Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
description	Proceedings of the 12th IASTED International Conference on Control and Applications, CA 2010
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Qu, Y. Tay, A. Lee, T.H.
format	Conference or Workshop Item
author	Qu, Y. Tay, A. Lee, T.H.
author_sort	Qu, Y.
title	Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
title_short	Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
title_full	Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
title_fullStr	Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
title_full_unstemmed	Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
title_sort	feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70326
_version_	1681087178605592576

Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithography

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