In-situ measurement & control of photoresist development in microlithography
10.1109/IMTC.2004.1351183
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2014
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sg-nus-scholar.10635-706082024-11-14T03:32:27Z In-situ measurement & control of photoresist development in microlithography Kiew, C.M. Tay, A. Ho, W.K. Lim, K.W. Zhou, Y. ELECTRICAL & COMPUTER ENGINEERING Microlithography Photoresist development Semiconductor manufacturing Temperature control 10.1109/IMTC.2004.1351183 Conference Record - IEEE Instrumentation and Measurement Technology Conference 2 803-808 CRIIE 2014-06-19T03:14:07Z 2014-06-19T03:14:07Z 2005 Conference Paper Kiew, C.M.,Tay, A.,Ho, W.K.,Lim, K.W.,Zhou, Y. (2005). In-situ measurement & control of photoresist development in microlithography. Conference Record - IEEE Instrumentation and Measurement Technology Conference 2 : 803-808. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IMTC.2004.1351183" target="_blank">https://doi.org/10.1109/IMTC.2004.1351183</a> 078038248X 10915281 http://scholarbank.nus.edu.sg/handle/10635/70608 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Microlithography Photoresist development Semiconductor manufacturing Temperature control |
| spellingShingle |
Microlithography Photoresist development Semiconductor manufacturing Temperature control Kiew, C.M. Tay, A. Ho, W.K. Lim, K.W. Zhou, Y. In-situ measurement & control of photoresist development in microlithography |
| description |
10.1109/IMTC.2004.1351183 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Kiew, C.M. Tay, A. Ho, W.K. Lim, K.W. Zhou, Y. |
| format |
Conference or Workshop Item |
| author |
Kiew, C.M. Tay, A. Ho, W.K. Lim, K.W. Zhou, Y. |
| author_sort |
Kiew, C.M. |
| title |
In-situ measurement & control of photoresist development in microlithography |
| title_short |
In-situ measurement & control of photoresist development in microlithography |
| title_full |
In-situ measurement & control of photoresist development in microlithography |
| title_fullStr |
In-situ measurement & control of photoresist development in microlithography |
| title_full_unstemmed |
In-situ measurement & control of photoresist development in microlithography |
| title_sort |
in-situ measurement & control of photoresist development in microlithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70608 |
| _version_ |
1821211254605217792 |