Integrated bake/chill module with in situ temperature measurement for photoresist processing
10.1109/TSM.2004.826959
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2014
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sg-nus-scholar.10635-706172023-10-26T08:59:14Z Integrated bake/chill module with in situ temperature measurement for photoresist processing Tay, A. Ho, W.-K. Loh, A.-P. Lim, K.-W. Tan, W.-W. Schaper, C.D. ELECTRICAL & COMPUTER ENGINEERING 300-mm wafer processing In situ temperature measurement Lithography Photoresist processing 10.1109/TSM.2004.826959 IEEE Transactions on Semiconductor Manufacturing 17 2 231-242 ITSME 2014-06-19T03:14:13Z 2014-06-19T03:14:13Z 2004-05 Conference Paper Tay, A., Ho, W.-K., Loh, A.-P., Lim, K.-W., Tan, W.-W., Schaper, C.D. (2004-05). Integrated bake/chill module with in situ temperature measurement for photoresist processing. IEEE Transactions on Semiconductor Manufacturing 17 (2) : 231-242. ScholarBank@NUS Repository. https://doi.org/10.1109/TSM.2004.826959 08946507 http://scholarbank.nus.edu.sg/handle/10635/70617 000221313700019 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
300-mm wafer processing In situ temperature measurement Lithography Photoresist processing |
| spellingShingle |
300-mm wafer processing In situ temperature measurement Lithography Photoresist processing Tay, A. Ho, W.-K. Loh, A.-P. Lim, K.-W. Tan, W.-W. Schaper, C.D. Integrated bake/chill module with in situ temperature measurement for photoresist processing |
| description |
10.1109/TSM.2004.826959 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.-K. Loh, A.-P. Lim, K.-W. Tan, W.-W. Schaper, C.D. |
| format |
Conference or Workshop Item |
| author |
Tay, A. Ho, W.-K. Loh, A.-P. Lim, K.-W. Tan, W.-W. Schaper, C.D. |
| author_sort |
Tay, A. |
| title |
Integrated bake/chill module with in situ temperature measurement for photoresist processing |
| title_short |
Integrated bake/chill module with in situ temperature measurement for photoresist processing |
| title_full |
Integrated bake/chill module with in situ temperature measurement for photoresist processing |
| title_fullStr |
Integrated bake/chill module with in situ temperature measurement for photoresist processing |
| title_full_unstemmed |
Integrated bake/chill module with in situ temperature measurement for photoresist processing |
| title_sort |
integrated bake/chill module with in situ temperature measurement for photoresist processing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70617 |
| _version_ |
1781783171244752896 |