Lithography in UV photoresist using NSOM

10.1117/12.595859

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Bibliographic Details
Main Authors:	Lin, Y., Hong, M.H., Wang, W.J., Law, Y.Z., Chong, T.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Femtosecond laser Lithography Near-field scanning optical microscopy UV photoresist
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70808
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70808
record_format	dspace
spelling	sg-nus-scholar.10635-708082023-10-29T21:43:05Z Lithography in UV photoresist using NSOM Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING Femtosecond laser Lithography Near-field scanning optical microscopy UV photoresist 10.1117/12.595859 Proceedings of SPIE - The International Society for Optical Engineering 5662 77-82 PSISD 2014-06-19T03:16:30Z 2014-06-19T03:16:30Z 2004 Conference Paper Lin, Y., Hong, M.H., Wang, W.J., Law, Y.Z., Chong, T.C. (2004). Lithography in UV photoresist using NSOM. Proceedings of SPIE - The International Society for Optical Engineering 5662 : 77-82. ScholarBank@NUS Repository. https://doi.org/10.1117/12.595859 0277786X http://scholarbank.nus.edu.sg/handle/10635/70808 000224751600013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Femtosecond laser Lithography Near-field scanning optical microscopy UV photoresist
spellingShingle	Femtosecond laser Lithography Near-field scanning optical microscopy UV photoresist Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C. Lithography in UV photoresist using NSOM
description	10.1117/12.595859
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C.
format	Conference or Workshop Item
author	Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C.
author_sort	Lin, Y.
title	Lithography in UV photoresist using NSOM
title_short	Lithography in UV photoresist using NSOM
title_full	Lithography in UV photoresist using NSOM
title_fullStr	Lithography in UV photoresist using NSOM
title_full_unstemmed	Lithography in UV photoresist using NSOM
title_sort	lithography in uv photoresist using nsom
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70808
_version_	1781783181572177920

Lithography in UV photoresist using NSOM

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