Real-time spatial control of photoresist development rate

Real-time spatial control of photoresist development rate

10.1117/12.711509

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Bibliographic Details
Main Authors: Tay, A., Ho, W.-K., Hu, N., Kiew, C.-M., Tsai, K.-Y.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Lithography
Photoresist development
Real-time control
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71571
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Institution: National University of Singapore
id sg-nus-scholar.10635-71571
record_format dspace
spelling sg-nus-scholar.10635-715712023-10-30T20:17:56Z Real-time spatial control of photoresist development rate Tay, A. Ho, W.-K. Hu, N. Kiew, C.-M. Tsai, K.-Y. ELECTRICAL & COMPUTER ENGINEERING Lithography Photoresist development Real-time control Temperature control 10.1117/12.711509 Proceedings of SPIE - The International Society for Optical Engineering 6518 PART 2 - PSISD 2014-06-19T03:25:14Z 2014-06-19T03:25:14Z 2007 Conference Paper Tay, A., Ho, W.-K., Hu, N., Kiew, C.-M., Tsai, K.-Y. (2007). Real-time spatial control of photoresist development rate. Proceedings of SPIE - The International Society for Optical Engineering 6518 (PART 2) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.711509 0819466379 0277786X http://scholarbank.nus.edu.sg/handle/10635/71571 000247393800087 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Lithography
Photoresist development
Real-time control
Temperature control
spellingShingle Lithography
Photoresist development
Real-time control
Temperature control
Tay, A.
Ho, W.-K.
Hu, N.
Kiew, C.-M.
Tsai, K.-Y.
Real-time spatial control of photoresist development rate
description 10.1117/12.711509
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tay, A.
Ho, W.-K.
Hu, N.
Kiew, C.-M.
Tsai, K.-Y.
format Conference or Workshop Item
author Tay, A.
Ho, W.-K.
Hu, N.
Kiew, C.-M.
Tsai, K.-Y.
author_sort Tay, A.
title Real-time spatial control of photoresist development rate
title_short Real-time spatial control of photoresist development rate
title_full Real-time spatial control of photoresist development rate
title_fullStr Real-time spatial control of photoresist development rate
title_full_unstemmed Real-time spatial control of photoresist development rate
title_sort real-time spatial control of photoresist development rate
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/71571
_version_ 1781783211698814976

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