Robust real-time thin film thickness estimation

Robust real-time thin film thickness estimation

10.1109/ASMC.2006.1638724

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Bibliographic Details
Main Authors: Kiew, C.M., Tay, A., Ho, W.K., Lim, K.W., Lee, J.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Film thickness estimation
Microlithography
Optical spectrometry
Photoresist development
Semiconductor manufacturing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71688
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Institution: National University of Singapore
Description
Summary:10.1109/ASMC.2006.1638724

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