Robust real-time thin film thickness estimation

Robust real-time thin film thickness estimation

10.1109/ASMC.2006.1638724

Saved in:
Bibliographic Details
Main Authors: Kiew, C.M., Tay, A., Ho, W.K., Lim, K.W., Lee, J.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Film thickness estimation
Microlithography
Optical spectrometry
Photoresist development
Semiconductor manufacturing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71688
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-71688
record_format dspace
spelling sg-nus-scholar.10635-716882015-03-26T18:21:33Z Robust real-time thin film thickness estimation Kiew, C.M. Tay, A. Ho, W.K. Lim, K.W. Lee, J.H. ELECTRICAL & COMPUTER ENGINEERING Film thickness estimation Microlithography Optical spectrometry Photoresist development Semiconductor manufacturing 10.1109/ASMC.2006.1638724 ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings 2006 57-62 2014-06-19T03:26:37Z 2014-06-19T03:26:37Z 2006 Conference Paper Kiew, C.M.,Tay, A.,Ho, W.K.,Lim, K.W.,Lee, J.H. (2006). Robust real-time thin film thickness estimation. ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings 2006 : 57-62. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ASMC.2006.1638724" target="_blank">https://doi.org/10.1109/ASMC.2006.1638724</a> 1424402549 10788743 http://scholarbank.nus.edu.sg/handle/10635/71688 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Film thickness estimation
Microlithography
Optical spectrometry
Photoresist development
Semiconductor manufacturing
spellingShingle Film thickness estimation
Microlithography
Optical spectrometry
Photoresist development
Semiconductor manufacturing
Kiew, C.M.
Tay, A.
Ho, W.K.
Lim, K.W.
Lee, J.H.
Robust real-time thin film thickness estimation
description 10.1109/ASMC.2006.1638724
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Kiew, C.M.
Tay, A.
Ho, W.K.
Lim, K.W.
Lee, J.H.
format Conference or Workshop Item
author Kiew, C.M.
Tay, A.
Ho, W.K.
Lim, K.W.
Lee, J.H.
author_sort Kiew, C.M.
title Robust real-time thin film thickness estimation
title_short Robust real-time thin film thickness estimation
title_full Robust real-time thin film thickness estimation
title_fullStr Robust real-time thin film thickness estimation
title_full_unstemmed Robust real-time thin film thickness estimation
title_sort robust real-time thin film thickness estimation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/71688
_version_ 1681087429375688704

Similar Items