Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant

10.1109/ICSICT.2010.5667527

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Main Authors:	Tong, Y., Koh, S.-M., Zhou, Q., Du, A.Y., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71717
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71717
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spelling	sg-nus-scholar.10635-717172015-03-20T17:57:49Z Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant Tong, Y. Koh, S.-M. Zhou, Q. Du, A.Y. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/ICSICT.2010.5667527 ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings 1021-1023 2014-06-19T03:26:57Z 2014-06-19T03:26:57Z 2010 Conference Paper Tong, Y.,Koh, S.-M.,Zhou, Q.,Du, A.Y.,Yeo, Y.-C. (2010). Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant. ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings : 1021-1023. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ICSICT.2010.5667527" target="_blank">https://doi.org/10.1109/ICSICT.2010.5667527</a> 9781424457984 http://scholarbank.nus.edu.sg/handle/10635/71717 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/ICSICT.2010.5667527
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tong, Y. Koh, S.-M. Zhou, Q. Du, A.Y. Yeo, Y.-C.
format	Conference or Workshop Item
author	Tong, Y. Koh, S.-M. Zhou, Q. Du, A.Y. Yeo, Y.-C.
spellingShingle	Tong, Y. Koh, S.-M. Zhou, Q. Du, A.Y. Yeo, Y.-C. Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant
author_sort	Tong, Y.
title	Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant
title_short	Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant
title_full	Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant
title_fullStr	Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant
title_full_unstemmed	Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant
title_sort	schottky barrier tuning at nisi/si interface using pre-silicide aluminum and sulfur co-implant
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71717
_version_	1681087434729717760

Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant

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