Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation
Advanced Metallization Conference (AMC)
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2014
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sg-nus-scholar.10635-732942015-03-20T18:55:11Z Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation Ho, C.S. Liew, S.L. See, A. Lim, C.Y.H. MECHANICAL ENGINEERING Advanced Metallization Conference (AMC) 707-712 MRSPD 2014-06-19T05:33:26Z 2014-06-19T05:33:26Z 2004 Conference Paper Ho, C.S.,Liew, S.L.,See, A.,Lim, C.Y.H. (2004). Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation. Advanced Metallization Conference (AMC) : 707-712. ScholarBank@NUS Repository. 15401766 http://scholarbank.nus.edu.sg/handle/10635/73294 NOT_IN_WOS Scopus |
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National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Advanced Metallization Conference (AMC) |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Ho, C.S. Liew, S.L. See, A. Lim, C.Y.H. |
| format |
Conference or Workshop Item |
| author |
Ho, C.S. Liew, S.L. See, A. Lim, C.Y.H. |
| spellingShingle |
Ho, C.S. Liew, S.L. See, A. Lim, C.Y.H. Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation |
| author_sort |
Ho, C.S. |
| title |
Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation |
| title_short |
Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation |
| title_full |
Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation |
| title_fullStr |
Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation |
| title_full_unstemmed |
Crystallographic orientation of Ta/TaN bilayer and its effect on seed and bulk Cu 〈111〉 formation |
| title_sort |
crystallographic orientation of ta/tan bilayer and its effect on seed and bulk cu 〈111〉 formation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73294 |
| _version_ |
1681087721930489856 |