Fabrication and parametric study of wafer-level multiple-copper-column interconnect

Fabrication and parametric study of wafer-level multiple-copper-column interconnect

Proceedings - Electronic Components and Technology Conference

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Bibliographic Details
Main Authors: Liao, E.B., Ang, S.S., Tay, A.A.O., Feng, H.H., Nagarajan, R., Kripesh, V.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73456
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Institution: National University of Singapore
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Summary:Proceedings - Electronic Components and Technology Conference

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