Measurement of transparent coating thickness by the use of white light interferometry

10.1117/12.621521

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Bibliographic Details
Main Authors: Li, M., Quan, C., Tay, C.J., Reading, I., Wang, S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
FFT
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73591
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-735912023-10-26T07:13:53Z Measurement of transparent coating thickness by the use of white light interferometry Li, M. Quan, C. Tay, C.J. Reading, I. Wang, S. MECHANICAL ENGINEERING Digital filtering FFT Transparent coating thickness White light interferometry 10.1117/12.621521 Proceedings of SPIE - The International Society for Optical Engineering 5852 PART I 401-406 PSISD 2014-06-19T05:36:59Z 2014-06-19T05:36:59Z 2005 Conference Paper Li, M., Quan, C., Tay, C.J., Reading, I., Wang, S. (2005). Measurement of transparent coating thickness by the use of white light interferometry. Proceedings of SPIE - The International Society for Optical Engineering 5852 PART I : 401-406. ScholarBank@NUS Repository. https://doi.org/10.1117/12.621521 0277786X http://scholarbank.nus.edu.sg/handle/10635/73591 000229932000066 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Digital filtering
FFT
Transparent coating thickness
White light interferometry
spellingShingle Digital filtering
FFT
Transparent coating thickness
White light interferometry
Li, M.
Quan, C.
Tay, C.J.
Reading, I.
Wang, S.
Measurement of transparent coating thickness by the use of white light interferometry
description 10.1117/12.621521
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Li, M.
Quan, C.
Tay, C.J.
Reading, I.
Wang, S.
format Conference or Workshop Item
author Li, M.
Quan, C.
Tay, C.J.
Reading, I.
Wang, S.
author_sort Li, M.
title Measurement of transparent coating thickness by the use of white light interferometry
title_short Measurement of transparent coating thickness by the use of white light interferometry
title_full Measurement of transparent coating thickness by the use of white light interferometry
title_fullStr Measurement of transparent coating thickness by the use of white light interferometry
title_full_unstemmed Measurement of transparent coating thickness by the use of white light interferometry
title_sort measurement of transparent coating thickness by the use of white light interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73591
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