Mechanical behavior of Cu/low-k stacks with different barrier layers
2005 Proceedings - 22nd International VLSI Multilevel Interconnection Conference, VMIC 2005
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73592 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-73592 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-735922015-02-21T04:32:01Z Mechanical behavior of Cu/low-k stacks with different barrier layers Sekhar, V.N. Balakumar, S. Tay, A.A.O. Sinha, S.K. MECHANICAL ENGINEERING Adhesion strength Cu/low-k Nanoindentation Nanoscratch 2005 Proceedings - 22nd International VLSI Multilevel Interconnection Conference, VMIC 2005 257-265 2014-06-19T05:37:00Z 2014-06-19T05:37:00Z 2005 Conference Paper Sekhar, V.N.,Balakumar, S.,Tay, A.A.O.,Sinha, S.K. (2005). Mechanical behavior of Cu/low-k stacks with different barrier layers. 2005 Proceedings - 22nd International VLSI Multilevel Interconnection Conference, VMIC 2005 : 257-265. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/73592 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| topic |
Adhesion strength Cu/low-k Nanoindentation Nanoscratch |
| spellingShingle |
Adhesion strength Cu/low-k Nanoindentation Nanoscratch Sekhar, V.N. Balakumar, S. Tay, A.A.O. Sinha, S.K. Mechanical behavior of Cu/low-k stacks with different barrier layers |
| description |
2005 Proceedings - 22nd International VLSI Multilevel Interconnection Conference, VMIC 2005 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Sekhar, V.N. Balakumar, S. Tay, A.A.O. Sinha, S.K. |
| format |
Conference or Workshop Item |
| author |
Sekhar, V.N. Balakumar, S. Tay, A.A.O. Sinha, S.K. |
| author_sort |
Sekhar, V.N. |
| title |
Mechanical behavior of Cu/low-k stacks with different barrier layers |
| title_short |
Mechanical behavior of Cu/low-k stacks with different barrier layers |
| title_full |
Mechanical behavior of Cu/low-k stacks with different barrier layers |
| title_fullStr |
Mechanical behavior of Cu/low-k stacks with different barrier layers |
| title_full_unstemmed |
Mechanical behavior of Cu/low-k stacks with different barrier layers |
| title_sort |
mechanical behavior of cu/low-k stacks with different barrier layers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73592 |
| _version_ |
1681087776192200704 |