Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors
10.1023/A:1006679625601
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2014
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sg-nus-scholar.10635-804032023-10-30T07:59:42Z Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors Cha, C.L. Chor, E.F. Jia, Y.M. Bourdillon, A.J. Gong, H. Pan, J.S. Zhang, A.Q. Tang, S.K. Boothroyd, C.B. MATERIALS SCIENCE ELECTRICAL ENGINEERING 10.1023/A:1006679625601 Journal of Materials Science Letters 18 17 1427-1431 JMSLD 2014-10-07T02:57:09Z 2014-10-07T02:57:09Z 1999-09-01 Article Cha, C.L., Chor, E.F., Jia, Y.M., Bourdillon, A.J., Gong, H., Pan, J.S., Zhang, A.Q., Tang, S.K., Boothroyd, C.B. (1999-09-01). Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors. Journal of Materials Science Letters 18 (17) : 1427-1431. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1006679625601 02618028 http://scholarbank.nus.edu.sg/handle/10635/80403 000082123300018 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1023/A:1006679625601 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Cha, C.L. Chor, E.F. Jia, Y.M. Bourdillon, A.J. Gong, H. Pan, J.S. Zhang, A.Q. Tang, S.K. Boothroyd, C.B. |
| format |
Article |
| author |
Cha, C.L. Chor, E.F. Jia, Y.M. Bourdillon, A.J. Gong, H. Pan, J.S. Zhang, A.Q. Tang, S.K. Boothroyd, C.B. |
| spellingShingle |
Cha, C.L. Chor, E.F. Jia, Y.M. Bourdillon, A.J. Gong, H. Pan, J.S. Zhang, A.Q. Tang, S.K. Boothroyd, C.B. Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| author_sort |
Cha, C.L. |
| title |
Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| title_short |
Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| title_full |
Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| title_fullStr |
Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| title_full_unstemmed |
Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| title_sort |
evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80403 |
| _version_ |
1781783904010633216 |