Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

• Main Authors: Cha, C.L., Chor, E.F., Jia, Y.M., Bourdillon, A.J., Gong, H., Pan, J.S., Zhang, A.Q., Tang, S.K., Boothroyd, C.B.
• Other Authors: MATERIALS SCIENCE
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/80403
• Institution: National University of Singapore

10.1023/A:1006679625601