Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

10.1023/A:1006679625601

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Bibliographic Details
Main Authors:	Cha, C.L., Chor, E.F., Jia, Y.M., Bourdillon, A.J., Gong, H., Pan, J.S., Zhang, A.Q., Tang, S.K., Boothroyd, C.B.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80403
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Institution:	National University of Singapore

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