Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

10.1023/A:1006679625601

Saved in:

Bibliographic Details
Main Authors:	Cha, C.L., Chor, E.F., Jia, Y.M., Bourdillon, A.J., Gong, H., Pan, J.S., Zhang, A.Q., Tang, S.K., Boothroyd, C.B.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80403
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Similar Items

ICP etching of RF sputtered and PECVD silicon carbide films
by: Shi, J., et al.
Published: (2014)

Single-photon sources in diamond, silicon carbide and gallium nitride
by: Zhou, Yu
Published: (2019)

Nanocantilevers made of bent silicon carbide nanowire-in-silicon oxide nanocones
by: Lin, M., et al.
Published: (2014)

The effects of polysilicon dopant depletion and Fowler-Nordheim tunnelling on the characteristics of N+ polysilicon-oxide-silicon capacitors
by: Ling, C.H., et al.
Published: (2014)

Characteristics and mechanism of inductive coupled plasma etching of hydrogenated amorphous silicon carbide films
by: Choi, W.K., et al.
Published: (2014)

Multiphase structure of hydrogenated amorphous silicon carbide thin films
by: Wang, Y.H., et al.
Published: (2014)

Robocasting of silicon carbide
by: Tan, Jia Ling
Published: (2018)

Atomic scale oxidation of silicon nanoclusters on silicon carbide surfaces
by: Chen, W., et al.
Published: (2014)

Ion beam synthesis of silicon carbide
by: Intarasiri S., et al.
Published: (2014)

Ion beam synthesis of silicon carbide
by: S. Intarasiri, et al.
Published: (2018)

The manufacture of silicon carbide abrasive
by: Escobar, Arturo
Published: (1961)

Effects of metals on the nitridation of silicon and mechanical properties of silicon nitride products
by: Tananya Vongthavorn
Published: (2009)

High temperature annealing of hydrogenated amorphous silicon carbide thin films
by: Wang, Y., et al.
Published: (2014)

Breakdown of reoxidized nitrided oxide (ONO) in Flash memory devices upon current stressing
by: Cha, C.L., et al.
Published: (2014)

Third order silicon (Si) nitride side-walled grating using silicon-on-insulatir (SOI)
by: Png, C.E., et al.
Published: (2014)

Embedded polysilicon gate MOSFET
by: CHAN, LAP, et al.
Published: (2012)

Plasma etching optimization of oxide/nitride/oxide interpoly dielectric breakdown time in flash memory devices
by: Cha, C.L., et al.
Published: (2014)

Argon incorporation and silicon carbide formation during low energy argon-ion bombardment of Si(100)
by: Pan, J.S., et al.
Published: (2014)

Third order silicon (SI) nitride side-walled grating using silicon-on-insulator (SOI)
by: Png, C.E., et al.
Published: (2014)

Effects of constant current-stressing on reoxidized nitrided oxide (ONO) in flash memory devices
by: Cha, C.L., et al.
Published: (2014)

Silicon carbide based inverters for energy efficiency
by: Vu, P. L. A., et al.
Published: (2013)

Self-assembly on silicon carbide nanomesh templates
by: Chen, W., et al.
Published: (2014)

3D printing of silicon carbide
by: Tan, Richard Yong Heng
Published: (2018)

Study of plasma etching of silicon carbide
by: Xia, Jinghua
Published: (2010)

Efficient generation of an array of single silicon-vacancy defects in silicon carbide
by: Wang, Junfeng, et al.
Published: (2018)

Constant current-stress induced breakdown of reoxidized nitrided oxide (ONO) in Flash memory devices
by: Cha, C.L., et al.
Published: (2014)

Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
by: Ling, C.H., et al.
Published: (2014)

Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
by: Siah, S.C., et al.
Published: (2014)

Evaluation of the dielectric breakdown of reoxidized nitrided oxide (ONO) in flash memory devices using constant current-stressing technique
by: Cha, C.L., et al.
Published: (2014)

Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
by: Cha, C.L., et al.
Published: (2014)

Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film
by: Chen, Rui, et al.
Published: (2013)

Microstructure tailoring in hot-pressed silicon carbide
by: Lee, Yan Xi.
Published: (2013)

Study of silicon-carbide power semiconductor devices
by: Ng, See Hong.
Published: (2011)

Design issues in silicon carbide power converters
by: Yin, Shan
Published: (2016)

AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation
by: Pan, J.S., et al.
Published: (2014)

Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
by: Wang, Y.H., et al.
Published: (2014)

Infrared reflectance study of chemical vapor deposition grown 3C-silicon carbide on silicon substrate
by: Chang, W.Y., et al.
Published: (2014)

Energy efficient and high temperature power semiconductors - comparison of silicon and silicon-carbide diodes
by: Lam, Wilfred Yi Heng.
Published: (2009)

Studies of optical properties of silicon-rich silicon nitride thin films
by: Cen, Zhanhong
Published: (2011)

DEVELOPMENT OF POLYSILICON-BASED TUNNEL JUNCTIONS FOR TWO-TERMINAL SILICON-BASED TANDEM SOLAR CELLS
by: NG XIN REN SAMUEL
Published: (2021)