Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples

10.1088/0268-1242/15/4/313

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Main Authors:	Remashan, K., Chua, S.J., Ramam, A., Prakash, S., Liu, W.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80593
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-805932024-11-14T03:35:22Z Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples Remashan, K. Chua, S.J. Ramam, A. Prakash, S. Liu, W. ELECTRICAL ENGINEERING 10.1088/0268-1242/15/4/313 Semiconductor Science and Technology 15 4 386-389 SSTEE 2014-10-07T02:59:13Z 2014-10-07T02:59:13Z 2000-04 Article Remashan, K., Chua, S.J., Ramam, A., Prakash, S., Liu, W. (2000-04). Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples. Semiconductor Science and Technology 15 (4) : 386-389. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/15/4/313 02681242 http://scholarbank.nus.edu.sg/handle/10635/80593 000086510100015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0268-1242/15/4/313
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Remashan, K. Chua, S.J. Ramam, A. Prakash, S. Liu, W.
format	Article
author	Remashan, K. Chua, S.J. Ramam, A. Prakash, S. Liu, W.
spellingShingle	Remashan, K. Chua, S.J. Ramam, A. Prakash, S. Liu, W. Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples
author_sort	Remashan, K.
title	Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples
title_short	Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples
title_full	Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples
title_fullStr	Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples
title_full_unstemmed	Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples
title_sort	inductively coupled plasma etching of gan using bcl3/cl2 chemistry and photoluminescence studies of the etched samples
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80593
_version_	1821216401466064896

Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples

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