New method for the localization of metallization defects using cathodoluminescence imaging

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

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Main Authors:	Liu, X., Phang, J.C.H., Chan, D.S.H., Chim, W.K.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81592
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81592
record_format	dspace
spelling	sg-nus-scholar.10635-815922015-04-06T03:52:44Z New method for the localization of metallization defects using cathodoluminescence imaging Liu, X. Phang, J.C.H. Chan, D.S.H. Chim, W.K. ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA 264-269 234 2014-10-07T03:09:56Z 2014-10-07T03:09:56Z 1997 Conference Paper Liu, X.,Phang, J.C.H.,Chan, D.S.H.,Chim, W.K. (1997). New method for the localization of metallization defects using cathodoluminescence imaging. Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA : 264-269. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81592 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Liu, X. Phang, J.C.H. Chan, D.S.H. Chim, W.K.
format	Conference or Workshop Item
author	Liu, X. Phang, J.C.H. Chan, D.S.H. Chim, W.K.
spellingShingle	Liu, X. Phang, J.C.H. Chan, D.S.H. Chim, W.K. New method for the localization of metallization defects using cathodoluminescence imaging
author_sort	Liu, X.
title	New method for the localization of metallization defects using cathodoluminescence imaging
title_short	New method for the localization of metallization defects using cathodoluminescence imaging
title_full	New method for the localization of metallization defects using cathodoluminescence imaging
title_fullStr	New method for the localization of metallization defects using cathodoluminescence imaging
title_full_unstemmed	New method for the localization of metallization defects using cathodoluminescence imaging
title_sort	new method for the localization of metallization defects using cathodoluminescence imaging
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81592
_version_	1681089099311611904

New method for the localization of metallization defects using cathodoluminescence imaging

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