New method for the localization of metallization defects using cathodoluminescence imaging
Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA
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Main Authors: | Liu, X., Phang, J.C.H., Chan, D.S.H., Chim, W.K. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81592 |
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Institution: | National University of Singapore |
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