Study of implanted boron distribution in p+n structures using scanning capacitance microscopy

Study of implanted boron distribution in p+n structures using scanning capacitance microscopy

10.1117/12.405388

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Bibliographic Details
Main Authors: Teo, Y.L., Pey, K.L., Chim, W.K., Chong, Y.F.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Dopant profiling
Pn junction
Scanning capacitance microscopy
Scanning probe microscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81769
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Institution: National University of Singapore
id sg-nus-scholar.10635-81769
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spelling sg-nus-scholar.10635-817692023-10-29T23:14:09Z Study of implanted boron distribution in p+n structures using scanning capacitance microscopy Teo, Y.L. Pey, K.L. Chim, W.K. Chong, Y.F. ELECTRICAL ENGINEERING Dopant profiling Pn junction Scanning capacitance microscopy Scanning probe microscopy 10.1117/12.405388 Proceedings of SPIE - The International Society for Optical Engineering 4227 175-183 PSISD 2014-10-07T03:11:51Z 2014-10-07T03:11:51Z 2000 Conference Paper Teo, Y.L., Pey, K.L., Chim, W.K., Chong, Y.F. (2000). Study of implanted boron distribution in p+n structures using scanning capacitance microscopy. Proceedings of SPIE - The International Society for Optical Engineering 4227 : 175-183. ScholarBank@NUS Repository. https://doi.org/10.1117/12.405388 0277786X http://scholarbank.nus.edu.sg/handle/10635/81769 000167995300028 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Dopant profiling
Pn junction
Scanning capacitance microscopy
Scanning probe microscopy
spellingShingle Dopant profiling
Pn junction
Scanning capacitance microscopy
Scanning probe microscopy
Teo, Y.L.
Pey, K.L.
Chim, W.K.
Chong, Y.F.
Study of implanted boron distribution in p+n structures using scanning capacitance microscopy
description 10.1117/12.405388
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Teo, Y.L.
Pey, K.L.
Chim, W.K.
Chong, Y.F.
format Conference or Workshop Item
author Teo, Y.L.
Pey, K.L.
Chim, W.K.
Chong, Y.F.
author_sort Teo, Y.L.
title Study of implanted boron distribution in p+n structures using scanning capacitance microscopy
title_short Study of implanted boron distribution in p+n structures using scanning capacitance microscopy
title_full Study of implanted boron distribution in p+n structures using scanning capacitance microscopy
title_fullStr Study of implanted boron distribution in p+n structures using scanning capacitance microscopy
title_full_unstemmed Study of implanted boron distribution in p+n structures using scanning capacitance microscopy
title_sort study of implanted boron distribution in p+n structures using scanning capacitance microscopy
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81769
_version_ 1781783990484598784

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