A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation

10.1109/LED.2004.833842

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Bibliographic Details
Main Authors:	Wu, N., Zhang, Q., Zhu, C., Chan, D.S.H., Du, A., Balasubramanian, N., Li, M.F., Chin, A., Sin, J.K.O., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81918
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81918
record_format	dspace
spelling	sg-nus-scholar.10635-819182023-10-26T21:45:41Z A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation Wu, N. Zhang, Q. Zhu, C. Chan, D.S.H. Du, A. Balasubramanian, N. Li, M.F. Chin, A. Sin, J.K.O. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING 10.1109/LED.2004.833842 IEEE Electron Device Letters 25 9 631-633 EDLED 2014-10-07T04:23:13Z 2014-10-07T04:23:13Z 2004-09 Article Wu, N., Zhang, Q., Zhu, C., Chan, D.S.H., Du, A., Balasubramanian, N., Li, M.F., Chin, A., Sin, J.K.O., Kwong, D.-L. (2004-09). A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation. IEEE Electron Device Letters 25 (9) : 631-633. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2004.833842 07413106 http://scholarbank.nus.edu.sg/handle/10635/81918 000223577600014 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/LED.2004.833842
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wu, N. Zhang, Q. Zhu, C. Chan, D.S.H. Du, A. Balasubramanian, N. Li, M.F. Chin, A. Sin, J.K.O. Kwong, D.-L.
format	Article
author	Wu, N. Zhang, Q. Zhu, C. Chan, D.S.H. Du, A. Balasubramanian, N. Li, M.F. Chin, A. Sin, J.K.O. Kwong, D.-L.
spellingShingle	Wu, N. Zhang, Q. Zhu, C. Chan, D.S.H. Du, A. Balasubramanian, N. Li, M.F. Chin, A. Sin, J.K.O. Kwong, D.-L. A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation
author_sort	Wu, N.
title	A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation
title_short	A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation
title_full	A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation
title_fullStr	A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation
title_full_unstemmed	A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation
title_sort	tan-hfo2-ge pmosfet with novel sih4 surface passivation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81918
_version_	1781784016059367424

A TaN-HfO2-Ge pMOSFET with novel SiH4 surface passivation

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