Annealing effects of tantalum thin films sputtered on [001] silicon substrate

Annealing effects of tantalum thin films sputtered on [001] silicon substrate

10.1016/S0928-4931(01)00280-6

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Bibliographic Details
Main Authors: Liu, L., Gong, H., Wang, Y., Wang, J., Wee, A.T.S, Liu, R.
Other Authors: INSTITUTE OF ENGINEERING SCIENCE
Format: Article
Published: 2014
Subjects:
Annealing effect
Diffusion
Phase transformation
SIMS
Stress
Tantalum
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81976
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Institution: National University of Singapore
Description
Summary:10.1016/S0928-4931(01)00280-6

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