Annealing effects of tantalum thin films sputtered on [001] silicon substrate

Annealing effects of tantalum thin films sputtered on [001] silicon substrate

10.1016/S0928-4931(01)00280-6

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Main Authors: Liu, L., Gong, H., Wang, Y., Wang, J., Wee, A.T.S, Liu, R.
Other Authors: INSTITUTE OF ENGINEERING SCIENCE
Format: Article
Published: 2014
Subjects:
Annealing effect
Diffusion
Phase transformation
SIMS
Stress
Tantalum
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81976
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-819762023-10-29T22:29:44Z Annealing effects of tantalum thin films sputtered on [001] silicon substrate Liu, L. Gong, H. Wang, Y. Wang, J. Wee, A.T.S Liu, R. INSTITUTE OF ENGINEERING SCIENCE ELECTRICAL & COMPUTER ENGINEERING MATERIALS SCIENCE PHYSICS Annealing effect Diffusion Phase transformation SIMS Stress Tantalum 10.1016/S0928-4931(01)00280-6 Materials Science and Engineering C 16 1-2 85-89 2014-10-07T04:23:55Z 2014-10-07T04:23:55Z 2001-10-20 Article Liu, L., Gong, H., Wang, Y., Wang, J., Wee, A.T.S, Liu, R. (2001-10-20). Annealing effects of tantalum thin films sputtered on [001] silicon substrate. Materials Science and Engineering C 16 (1-2) : 85-89. ScholarBank@NUS Repository. https://doi.org/10.1016/S0928-4931(01)00280-6 09284931 http://scholarbank.nus.edu.sg/handle/10635/81976 000171736900017 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Annealing effect
Diffusion
Phase transformation
SIMS
Stress
Tantalum
spellingShingle Annealing effect
Diffusion
Phase transformation
SIMS
Stress
Tantalum
Liu, L.
Gong, H.
Wang, Y.
Wang, J.
Wee, A.T.S
Liu, R.
Annealing effects of tantalum thin films sputtered on [001] silicon substrate
description 10.1016/S0928-4931(01)00280-6
author2 INSTITUTE OF ENGINEERING SCIENCE
author_facet INSTITUTE OF ENGINEERING SCIENCE
Liu, L.
Gong, H.
Wang, Y.
Wang, J.
Wee, A.T.S
Liu, R.
format Article
author Liu, L.
Gong, H.
Wang, Y.
Wang, J.
Wee, A.T.S
Liu, R.
author_sort Liu, L.
title Annealing effects of tantalum thin films sputtered on [001] silicon substrate
title_short Annealing effects of tantalum thin films sputtered on [001] silicon substrate
title_full Annealing effects of tantalum thin films sputtered on [001] silicon substrate
title_fullStr Annealing effects of tantalum thin films sputtered on [001] silicon substrate
title_full_unstemmed Annealing effects of tantalum thin films sputtered on [001] silicon substrate
title_sort annealing effects of tantalum thin films sputtered on [001] silicon substrate
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81976
_version_ 1781784030111334400

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