Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric

10.1016/j.tsf.2004.05.046

Saved in:
Bibliographic Details
Main Authors: Ng, T.H., Ho, V., Teo, L.W., Tay, M.S., Koh, B.H., Chim, W.K., Choi, W.K., Du, A.Y., Tung, C.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82330
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-82330
record_format dspace
spelling sg-nus-scholar.10635-823302024-11-14T10:20:36Z Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric Ng, T.H. Ho, V. Teo, L.W. Tay, M.S. Koh, B.H. Chim, W.K. Choi, W.K. Du, A.Y. Tung, C.H. ELECTRICAL & COMPUTER ENGINEERING Charge retention Charge storage Germanium nanocrystals High-κ tunnel dielectric Memory device 10.1016/j.tsf.2004.05.046 Thin Solid Films 462-463 SPEC. ISS. 46-50 THSFA 2014-10-07T04:28:06Z 2014-10-07T04:28:06Z 2004-09 Article Ng, T.H., Ho, V., Teo, L.W., Tay, M.S., Koh, B.H., Chim, W.K., Choi, W.K., Du, A.Y., Tung, C.H. (2004-09). Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric. Thin Solid Films 462-463 (SPEC. ISS.) : 46-50. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.046 00406090 http://scholarbank.nus.edu.sg/handle/10635/82330 000223812800011 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Charge retention
Charge storage
Germanium nanocrystals
High-κ tunnel dielectric
Memory device
spellingShingle Charge retention
Charge storage
Germanium nanocrystals
High-κ tunnel dielectric
Memory device
Ng, T.H.
Ho, V.
Teo, L.W.
Tay, M.S.
Koh, B.H.
Chim, W.K.
Choi, W.K.
Du, A.Y.
Tung, C.H.
Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
description 10.1016/j.tsf.2004.05.046
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ng, T.H.
Ho, V.
Teo, L.W.
Tay, M.S.
Koh, B.H.
Chim, W.K.
Choi, W.K.
Du, A.Y.
Tung, C.H.
format Article
author Ng, T.H.
Ho, V.
Teo, L.W.
Tay, M.S.
Koh, B.H.
Chim, W.K.
Choi, W.K.
Du, A.Y.
Tung, C.H.
author_sort Ng, T.H.
title Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
title_short Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
title_full Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
title_fullStr Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
title_full_unstemmed Fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
title_sort fabrication and characterization of a trilayer germanium nanocrystal memory device with hafnium dioxide as the tunnel dielectric
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82330
_version_ 1821189366917103616