High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications
10.1149/2.085112jes
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2014
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sg-nus-scholar.10635-824522023-10-29T22:39:30Z High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications Phung, T.H. Srinivasan, D.K. Steinmann, P. Wise, R. Yu, M.-B. Yeo, Y.-C. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/2.085112jes Journal of the Electrochemical Society 158 12 H1289-H1292 JESOA 2014-10-07T04:29:34Z 2014-10-07T04:29:34Z 2011 Article Phung, T.H., Srinivasan, D.K., Steinmann, P., Wise, R., Yu, M.-B., Yeo, Y.-C., Zhu, C. (2011). High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications. Journal of the Electrochemical Society 158 (12) : H1289-H1292. ScholarBank@NUS Repository. https://doi.org/10.1149/2.085112jes 00134651 http://scholarbank.nus.edu.sg/handle/10635/82452 000297979300089 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1149/2.085112jes |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Phung, T.H. Srinivasan, D.K. Steinmann, P. Wise, R. Yu, M.-B. Yeo, Y.-C. Zhu, C. |
| format |
Article |
| author |
Phung, T.H. Srinivasan, D.K. Steinmann, P. Wise, R. Yu, M.-B. Yeo, Y.-C. Zhu, C. |
| spellingShingle |
Phung, T.H. Srinivasan, D.K. Steinmann, P. Wise, R. Yu, M.-B. Yeo, Y.-C. Zhu, C. High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications |
| author_sort |
Phung, T.H. |
| title |
High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications |
| title_short |
High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications |
| title_full |
High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications |
| title_fullStr |
High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications |
| title_full_unstemmed |
High performance metal-insulator-metal capacitors with Er2O 3 on ALD SiO2 for RF applications |
| title_sort |
high performance metal-insulator-metal capacitors with er2o 3 on ald sio2 for rf applications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82452 |
| _version_ |
1781784140800065536 |