High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate

10.1088/0256-307X/22/8/055

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Main Authors: Zhu, S.-Y., Li, M.-F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82453
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-824532018-03-29T09:51:17Z High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate Zhu, S.-Y. Li, M.-F. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0256-307X/22/8/055 Chinese Physics Letters 22 8 2020-2022 2014-10-07T04:29:34Z 2014-10-07T04:29:34Z 2005-08-01 Article Zhu, S.-Y., Li, M.-F. (2005-08-01). High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate. Chinese Physics Letters 22 (8) : 2020-2022. ScholarBank@NUS Repository. https://doi.org/10.1088/0256-307X/22/8/055 0256307X http://scholarbank.nus.edu.sg/handle/10635/82453 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1088/0256-307X/22/8/055
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhu, S.-Y.
Li, M.-F.
format Article
author Zhu, S.-Y.
Li, M.-F.
spellingShingle Zhu, S.-Y.
Li, M.-F.
High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate
author_sort Zhu, S.-Y.
title High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate
title_short High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate
title_full High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate
title_fullStr High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate
title_full_unstemmed High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate
title_sort high performance p-channel schottky barrier mosfets with self-aligned ptsi source/drain on thin film soi substrate
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82453
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