High performance P-channel schottky barrier MOSFETs with self-aligned PtSi source/drain on thin film SOI substrate

10.1088/0256-307X/22/8/055

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Bibliographic Details
Main Authors: Zhu, S.-Y., Li, M.-F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82453
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Institution: National University of Singapore
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