Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing

10.1016/j.jmatprotec.2007.04.089

Saved in:

Bibliographic Details
Main Authors:	Lin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Tan, L.S., Wang, Z.B., Shi, L.P., Chong, T.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Alkaline solution etching Electrical force microscopy Near-field scanning optical microscopy Phase change material
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82481
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-82481
record_format	dspace
spelling	sg-nus-scholar.10635-824812023-10-25T22:06:12Z Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing Lin, Y. Hong, M.H. Chen, G.X. Lim, C.S. Tan, L.S. Wang, Z.B. Shi, L.P. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE Alkaline solution etching Electrical force microscopy Near-field scanning optical microscopy Phase change material 10.1016/j.jmatprotec.2007.04.089 Journal of Materials Processing Technology 192-193 340-345 JMPTE 2014-10-07T04:29:54Z 2014-10-07T04:29:54Z 2007-10-01 Article Lin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Tan, L.S., Wang, Z.B., Shi, L.P., Chong, T.C. (2007-10-01). Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing. Journal of Materials Processing Technology 192-193 : 340-345. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmatprotec.2007.04.089 09240136 http://scholarbank.nus.edu.sg/handle/10635/82481 000249314100053 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Alkaline solution etching Electrical force microscopy Near-field scanning optical microscopy Phase change material
spellingShingle	Alkaline solution etching Electrical force microscopy Near-field scanning optical microscopy Phase change material Lin, Y. Hong, M.H. Chen, G.X. Lim, C.S. Tan, L.S. Wang, Z.B. Shi, L.P. Chong, T.C. Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
description	10.1016/j.jmatprotec.2007.04.089
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lin, Y. Hong, M.H. Chen, G.X. Lim, C.S. Tan, L.S. Wang, Z.B. Shi, L.P. Chong, T.C.
format	Article
author	Lin, Y. Hong, M.H. Chen, G.X. Lim, C.S. Tan, L.S. Wang, Z.B. Shi, L.P. Chong, T.C.
author_sort	Lin, Y.
title	Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
title_short	Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
title_full	Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
title_fullStr	Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
title_full_unstemmed	Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
title_sort	hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82481
_version_	1781784149015658496

Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing

Similar Items