Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing

Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing

10.1016/j.jmatprotec.2007.04.089

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Bibliographic Details
Main Authors: Lin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Tan, L.S., Wang, Z.B., Shi, L.P., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Alkaline solution etching
Electrical force microscopy
Near-field scanning optical microscopy
Phase change material
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82481
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Institution: National University of Singapore

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