Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing

• Main Authors: Lin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Tan, L.S., Wang, Z.B., Shi, L.P., Chong, T.C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Alkaline solution etching; Electrical force microscopy; Near-field scanning optical microscopy; Phase change material
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82481
• Institution: National University of Singapore

10.1016/j.jmatprotec.2007.04.089