Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation
10.1149/1.3489946
Saved in:
Main Authors: | , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82554 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-82554 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-825542023-10-25T23:18:12Z Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation Oh, H.-J. Suleiman, S.A.B. Lee, S. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.3489946 Journal of the Electrochemical Society 157 11 H1051-H1060 JESOA 2014-10-07T04:30:45Z 2014-10-07T04:30:45Z 2010 Article Oh, H.-J., Suleiman, S.A.B., Lee, S. (2010). Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation. Journal of the Electrochemical Society 157 (11) : H1051-H1060. ScholarBank@NUS Repository. https://doi.org/10.1149/1.3489946 00134651 http://scholarbank.nus.edu.sg/handle/10635/82554 000283857900092 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
10.1149/1.3489946 |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Oh, H.-J. Suleiman, S.A.B. Lee, S. |
format |
Article |
author |
Oh, H.-J. Suleiman, S.A.B. Lee, S. |
spellingShingle |
Oh, H.-J. Suleiman, S.A.B. Lee, S. Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation |
author_sort |
Oh, H.-J. |
title |
Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation |
title_short |
Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation |
title_full |
Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation |
title_fullStr |
Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation |
title_full_unstemmed |
Interface engineering for InGaAs n-MOSFET application using plasma PH 3-N2 passivation |
title_sort |
interface engineering for ingaas n-mosfet application using plasma ph 3-n2 passivation |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/82554 |
_version_ |
1781784169194455040 |