Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms

10.1063/1.1561995

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Main Authors: Chim, W.K., Ng, T.H., Koh, B.H., Choi, W.K., Zheng, J.X., Tung, C.H., Du, A.Y.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82560
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-825602024-11-14T10:20:43Z Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms Chim, W.K. Ng, T.H. Koh, B.H. Choi, W.K. Zheng, J.X. Tung, C.H. Du, A.Y. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1561995 Journal of Applied Physics 93 8 4788-4793 JAPIA 2014-10-07T04:30:49Z 2014-10-07T04:30:49Z 2003-04-15 Article Chim, W.K., Ng, T.H., Koh, B.H., Choi, W.K., Zheng, J.X., Tung, C.H., Du, A.Y. (2003-04-15). Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms. Journal of Applied Physics 93 (8) : 4788-4793. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1561995 00218979 http://scholarbank.nus.edu.sg/handle/10635/82560 000181863100065 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.1561995
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Chim, W.K.
Ng, T.H.
Koh, B.H.
Choi, W.K.
Zheng, J.X.
Tung, C.H.
Du, A.Y.
format Article
author Chim, W.K.
Ng, T.H.
Koh, B.H.
Choi, W.K.
Zheng, J.X.
Tung, C.H.
Du, A.Y.
spellingShingle Chim, W.K.
Ng, T.H.
Koh, B.H.
Choi, W.K.
Zheng, J.X.
Tung, C.H.
Du, A.Y.
Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
author_sort Chim, W.K.
title Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
title_short Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
title_full Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
title_fullStr Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
title_full_unstemmed Interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
title_sort interfacial and bulk properties of zirconium dioxide as a gate dielectric in metal-insulator-semiconductor structures and current transport mechanisms
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82560
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