Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon

10.1063/1.1521579

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Bibliographic Details
Main Authors:	Chong, Y.F., Pey, K.L., Wee, A.T.S., Thompson, M.O., Tung, C.H., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82609
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82609
record_format	dspace
spelling	sg-nus-scholar.10635-826092023-10-30T08:08:00Z Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon Chong, Y.F. Pey, K.L. Wee, A.T.S. Thompson, M.O. Tung, C.H. See, A. ELECTRICAL & COMPUTER ENGINEERING PHYSICS 10.1063/1.1521579 Applied Physics Letters 81 20 3786-3788 APPLA 2014-10-07T04:31:24Z 2014-10-07T04:31:24Z 2002-11-11 Article Chong, Y.F., Pey, K.L., Wee, A.T.S., Thompson, M.O., Tung, C.H., See, A. (2002-11-11). Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon. Applied Physics Letters 81 (20) : 3786-3788. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1521579 00036951 http://scholarbank.nus.edu.sg/handle/10635/82609 000179042200028 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1521579
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chong, Y.F. Pey, K.L. Wee, A.T.S. Thompson, M.O. Tung, C.H. See, A.
format	Article
author	Chong, Y.F. Pey, K.L. Wee, A.T.S. Thompson, M.O. Tung, C.H. See, A.
spellingShingle	Chong, Y.F. Pey, K.L. Wee, A.T.S. Thompson, M.O. Tung, C.H. See, A. Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon
author_sort	Chong, Y.F.
title	Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon
title_short	Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon
title_full	Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon
title_fullStr	Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon
title_full_unstemmed	Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon
title_sort	laser-induced amorphization of silicon during pulsed-laser irradiation of tin/ti/polycrystalline silicon/sio2/silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82609
_version_	1781784181990227968

Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon

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