Laser-induced amorphization of silicon during pulsed-laser irradiation of Tin/Ti/polycrystalline silicon/SiO2/silicon

by Chong, Y.F., Pey, K.L., Wee, A.T.S., Thompson, M.O., Tung, C.H., See, A.
Published 2014

Time-resolved reflectance studies of silicon during laser thermal processing of amorphous silicon gates on ultrathin gate oxides

by Chong, Y.F., Gossmann, H.-J.L., Thompson, M.O., Yang, S., Pey, K.L., Wee, A.T.S.
Published 2014

Reduction of Polysilicon Gate Depletion Effect in NMOS Devices Using Laser Thermal Processing

by Chong, Y.F., Gossmann, H.-J.L., Pey, K.L., Thompson, M.O., Wee, A.T.S., Tung, C.H.
Published 2014

Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing

by Chong, Y.F., Gossmann, H.-J.L., Thompson, M.O., Pey, K.L., Wee, A.T.S., Talwar, S., Chan, L.
Published 2014

Laser thermal processing of amorphous silicon gates to reduce poly-depletion in CMOS devices

by Chong, Y.F., Gossmann, H.-J.L., Pey, K.-L., Thompson, M.O., Wee, A.T.S., Tung, C.H.
Published 2014