New salicidation technology with Ni(Pt) alloy for MOSFETs

10.1109/55.974579

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Bibliographic Details
Main Authors:	Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Ni(Pt)Si NiSi Salicidation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82755
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82755
record_format	dspace
spelling	sg-nus-scholar.10635-827552023-10-30T08:01:34Z New salicidation technology with Ni(Pt) alloy for MOSFETs Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Chan, L. ELECTRICAL & COMPUTER ENGINEERING MATERIALS SCIENCE Ni(Pt)Si NiSi Salicidation 10.1109/55.974579 IEEE Electron Device Letters 22 12 568-570 EDLED 2014-10-07T04:33:07Z 2014-10-07T04:33:07Z 2001-12 Article Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Chan, L. (2001-12). New salicidation technology with Ni(Pt) alloy for MOSFETs. IEEE Electron Device Letters 22 (12) : 568-570. ScholarBank@NUS Repository. https://doi.org/10.1109/55.974579 07413106 http://scholarbank.nus.edu.sg/handle/10635/82755 000173223900002 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Ni(Pt)Si NiSi Salicidation
spellingShingle	Ni(Pt)Si NiSi Salicidation Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Chan, L. New salicidation technology with Ni(Pt) alloy for MOSFETs
description	10.1109/55.974579
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Chan, L.
format	Article
author	Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Chi, D.Z. Chan, L.
author_sort	Lee, P.S.
title	New salicidation technology with Ni(Pt) alloy for MOSFETs
title_short	New salicidation technology with Ni(Pt) alloy for MOSFETs
title_full	New salicidation technology with Ni(Pt) alloy for MOSFETs
title_fullStr	New salicidation technology with Ni(Pt) alloy for MOSFETs
title_full_unstemmed	New salicidation technology with Ni(Pt) alloy for MOSFETs
title_sort	new salicidation technology with ni(pt) alloy for mosfets
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82755
_version_	1781784215548854272

New salicidation technology with Ni(Pt) alloy for MOSFETs

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